Class 10 GaAs Wafer Fabrication Facility

Semiconductor | New Jersey

Client is helping power the wireless revolution with industry-leading power amplifiers for wireless and broadband applications, and enabling manufacturers to enhance overall system performance by reducing the size and weight of their products, increasing power efficiency, improving reliability, and reducing manufacturing cost and time to market.

Project Overview

PROTECS was hired to provide expansion and redundancy for the make-up air and process exhaust systems for a 150,000 SF headquarters / R&D facility, including a Class 10 GaAs Wafer Fabrication facility.  The project included a new 40,000 CFM state-of-the-art make-up air handling unit using fan wall technology, 45,000 CFM of new FRP acid process exhaust fans, 28,000 CFM of process solvent exhaust fans, 22,000 CFM of process heat exhaust fans, 400 tons of new medium temperature chilled water capacity, 200 tons of new low temperature chilled water capacity and a redundant 200 ton low temperature chiller.

A new steam- to-hot water heat exchanger was provided as a skid-based system to generate and distribute hot water.  New pump skid systems were also used to replace existing pumps and to distribute the low temperature and medium temperature chilled water.